A formalized approach to assessing the qualitative conditions of the ion-plasma hardening coating process

Abstract

A method is proposed for quantifying the qualitative state of ion-plasma coating processes by analyzing a set of technological conditions of the process using qualimetry methods. A mathematical model of the complex of qualitative characteristics of the plasma medium in the coating process is considered, which assumes a quantitative assessment of the main characteristic parameters, taking into account the relationship between the operating pressure of the gas in the vacuum chamber and the presence of gas impurities in it. The results of the approbation of the proposed method under various conditions for the implementation of ion-plasma coating are presented.