Features of thermal processes and the influence of pulsed heating of surface layers of titanium on the diffusion transfer of dopants during high-intensity ion implantation

Abstract

Methods for modification of surface and near-surface layers of materials and coatings by ion beamshave prospects for application in many fields of science and technology. The method of high-intensityimplantation by high-power density ion beams with submillisecond duration involves significantpulsed heating of the irradiated target’s surface layer, followed by its rapid cooling due to heatremoval into the material due to thermal conductivity and the implementation of repetitively-pulsedradiation-enhanced diffusion of atoms to depths significantly exceeding the projective ion range. Thispaper considers features of thermal processes and the effect of pulsed heating of near-surface titaniumlayers on diffusion transfer under conditions of synergy of high-intensity titanium ion implantationand energy impact of a high-power density repetitively-pulsed beam on the surface to increase iondoping depth due to radiation-enhanced diffusion under conditions of limited heating of the entiresample. The paper presents the data of numerical simulation of dynamic changes in temperature fieldsin titanium and titanium self-diffusion under the action of ion beams with a submillisecond durationand a pulse power of tens of kW/cm2 and fluence of ions in a pulse 1.25×1015 ion/cm2.