Ribbon electron beam source operating in a wide pressure range

Abstract

The design and basic parameters of an electronic source forming a ribbon electron beam in thepressure range from 10–2 to 10 Pa are presented. The beam current reaches 450 mA, with the electronenergy of the beam up to 8 kV. The dimensions of the electron beam in the beam cross section are10×220 mm2. Working gases – helium, argon, residual atmosphere. The expansion of the pressurerange is provided by the use of two discharge systems – the main and auxiliary, between which thereis a pressure difference. The auxiliary discharge system operates at a pressure of one Pascal and servesfor maintaining the discharge in the main system operating in high vacuum by supplying it withcharged particles. Both the main and auxiliary systems use glow discharges with a hollow cathode.The uniformity of the beam current distribution over its cross-section is ensured by using a specialdesign of the emission electrode located in the anode of the main discharge system. The degree ofinhomogeneity of the electron beam current density distribution does not exceed 15% in length. Theobtained parameters of the electron beam are promising from the point of view of generating a beamplasma, initiating a beam-plasma discharge and using it for the implementation of plasma chemicalprocessing of materials.