Gas-metallic beam-plasma formations for deposition of strengthening coatings

Abstract

In the modern world, a vacuum arc is most often used to depositing coatings in plasma technologies. This method is called vacuum-arc deposition and it is the most attractive of the variety of coating options. Two discharge schemes are used in work. In the first scheme two vacuum-arc evaporators were used to generate metal plasma, as well as a PINK to generate gas plasma. The anode for the plasma sources was the inner walls of a vacuum chamber. The gas plasma source formed a plasma with a concentration gradient directed towards the walls of the chamber, while the maximum concentration area was located near the outlet of the source. In the second discharge scheme a gas-metal beam-plasma formation was formed in the hollow cathode of non-self-sustained glow discharge. In both discharge circuits a (Zn+Ti-B-Si-Ni)N coating was deposited. According to the results of measurements, the hardness values were 41 GPa during deposition in the traditional scheme and 47.8 GPa during deposition in the scheme in a gas-metal beam-plasma formation.