Arc deposition of coatings based on aluminum oxide in elion mode

Abstract

Experiments on the synthesis of a coating based on aluminum oxide using arc deposition and a gridless ion acceleration system were carried out. The studies were carried out on an experimental bench based on the NNV-6.6-I1 setup using two plasma generators: PINK for gas plasma generating and an arc evaporator with an A7 aluminum alloy cathode for gas-metal plasma generating. The substrate temperature was controlled by using the elion mode of plasma-physical devices operation. The possibility of deposition of a non-conductive coating based on aluminum oxide while maintaining a given temperature by use of the elion mode of system operation is shown. The phase composition of the obtained films and its change depending on the substrate temperature and other deposition conditions have been studied. It is important to note that no negative bias was applied to the substrate during deposition. The substrate temperature affects the phase composition of the resulting coating.