Deposition of thin films of solid electrolyte LiPON in a vapor-gas medium (Li3PO4 /Ar-N2) activated in a low-pressure arc

Abstract

Thin films of solid-state lithium-ion electrolytes are promising for use in small-sized autonomouspower sources, elements of micro- and nanoelectronics. The high rate of vacuum-plasmasynthesis (~0.5 μm/h) of lithium phosphor-oxynitride (LiPON) films with ionic conductivityof ~2·10–6 (Ohm·cm)–1 is provided by the method of anodic evaporation of Li3PO4 in a low pressurearc [1]. The microstructure and ionic conductivity of LiPON films are significantly affectedby the fraction of free lithium in the vapor flow, which is controlled by changing the frequencyof interaction of electrons with evaporated particles. This paper presents the results of studyingthe conditions of anodic evaporation of Li3PO4 in an electron flow from a discharge plasma witha self-heating hollow cathode and the effect of free lithium in a vapor–gas mixture on the propertiesof deposited LiPON films.