Features of titanium ion beams formation taking into account ion-electron emission realizing the synergy of high-intensity ion implantation and pulsed energy impact on the surface

Abstract

In this work, we show the possibility of forming titanium ion beams of submillisecond durationin the average ion energy range from 20 to 60 keV with a maximum ion current densityof 3.3 A/cm2 at a pulsed power density of 132 kW/cm2 in individual pulses. The dependence of theion-electron emission coefficient on the average energy and current of the arc discharge is presented.It has been established that the ion-electron emission coefficient in the case of irradiation of a stainlesssteel target with a beam of titanium ions reaches a value of 1.6 at an average ion energy of 60 keV.The dependences of the radial distribution of the ion current density on the average ion energy areobtained for different positions of the collector relative to the geometric focus of the ballistic systemfor focusing the ion beam. Taking into account ion-electron emission, it has been experimentallyshown that with an increase in the average ion energy from 20 keV to 40 keV, an increase in the densityof the measured ion current is observed, while in the range from 40 to 60 keV, the ion current densitydecreases. Using nineteen collector sensors, it was shown that due to the influence of the partiallyuncompensated space charge of the ion beam, the best conditions for its focusing are achieved at adistance of 20 mm behind the geometric focus of the system.